JPS61195048U - - Google Patents
Info
- Publication number
- JPS61195048U JPS61195048U JP1985077558U JP7755885U JPS61195048U JP S61195048 U JPS61195048 U JP S61195048U JP 1985077558 U JP1985077558 U JP 1985077558U JP 7755885 U JP7755885 U JP 7755885U JP S61195048 U JPS61195048 U JP S61195048U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- shielding case
- wall
- stator
- shields
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Control Of Electric Motors In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077558U JPH058674Y2 (en]) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077558U JPH058674Y2 (en]) | 1985-05-24 | 1985-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195048U true JPS61195048U (en]) | 1986-12-04 |
| JPH058674Y2 JPH058674Y2 (en]) | 1993-03-04 |
Family
ID=30620732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985077558U Expired - Lifetime JPH058674Y2 (en]) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058674Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0341249U (en]) * | 1989-09-01 | 1991-04-19 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741374A (en) * | 1980-08-25 | 1982-03-08 | Hitachi Ltd | Sample mounting and dismounting device in plasma etching device or resembling device |
-
1985
- 1985-05-24 JP JP1985077558U patent/JPH058674Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741374A (en) * | 1980-08-25 | 1982-03-08 | Hitachi Ltd | Sample mounting and dismounting device in plasma etching device or resembling device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0341249U (en]) * | 1989-09-01 | 1991-04-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058674Y2 (en]) | 1993-03-04 |